53 citations · 78 across the 8 of their papers we have counts for
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Temperature-Dependent Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition for Tunnel Barriers in Josephson Junctions
Ekta Bhatia, Aaron Lopez Gonzalez, Yoshitha Hettige +9
We report the dielectric functions of insulating tantalum nitride (TaN) films, deposited using atomic layer deposition (ALD) on 300 mm Si/SiO2 substrates, to demonstrate their suit…
Effects of Integrated Heatsinking on Superconductivity in Tantalum Nitride Nanowires at the 300 Millimeter Scale
Ekta Bhatia, Tharanga R. Nanayakkara, Chenyu Zhou +14
We report the superconducting properties of tantalum nitride (TaN) nanowires and TaN/copper (TaN/Cu) bilayer nanowires fabricated on 300 mm silicon wafers using CMOS-compatible pro…
Eliminating Surface Oxides of Superconducting Circuits with Noble Metal Encapsulation
Ray D. Chang, Nana Shumiya, Russell A. McLellan +15
The lifetime of superconducting qubits is limited by dielectric loss, and a major source of dielectric loss is the native oxide present at the surface of the superconducting metal.…