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cond-mat.mes-hall2026
Hydrogen plasma-assisted atomic layer epitaxy of superconducting titanium nitride
Yi-Hsun Chen, Yin-Chun Huang, Zachary Degnan +10
Atomic layer deposition (ALD) offers precise, conformal control of thin-film growth and is a workhorse for semiconductor manufacturing, but its use in superconducting quantum circu…
quant-ph2026
Reducing TLS loss in tantalum CPW resonators using titanium sacrificial layers
Zachary Degnan, Chun-Ching Chiu, Yi-Hsun Chen +5
We demonstrate a substantial reduction in two-level system loss in tantalum coplanar waveguide resonators fabricated on high-resistivity silicon substrates through the use of an ul…