5 papers
Thermo-optic modulator with ultra-high extinction ratio for low-loss silicon nitride integrated photonics
Dmitriy Serkin, Kirill Buzaverov, Aleksandr Baburin +9
Extremely low-loss silicon nitride integrated circuits is a potential platform for a growing number of frontier applications in quantum technologies, high-performance and analog co…
Investigation of tantalum films growth for coplanar resonators with internal quality factors above ten million
E. V. Zikiy, N. S. Smirnov, E. A. Krivko +13
Alpha-tantalum on silicon is a promising platform for high-coherence superconducting quantum circuits. However, the growth mechanism of alpha-tantalum on silicon remains poorly und…
Mutual control of critical temperature, residual resistance ratio, stress, and roughness for sputtered Nb films
E. V. Zikiy, I. A. Stepanov, S. V. Bukatin +10
Superconducting single quantum logic integrated circuits traditionally exploit magnetron sputtered niobium thin films on silicon oxide substrates. The sputtering depends on multipl…
Silicon nitride integrated photonics from visible to mid-infrared spectra
Kirill A. Buzaverov, Aleksandr S. Baburin, Evgeny V. Sergeev +9
Recently, silicon nitride (Si3N4) photonic integrated circuits (PICs) are of a great interest due to their extremely low waveguides losses. The number of Si3N4 integrated photonics…
Tutorial on Silicon Photonics Integrated Platform Fiber Edge Coupling
Sergey S. Avdeev, Aleksandr S. Baburin, Evgeniy V. Sergeev +11
Photonic integrated circuits (PICs) play a crucial role in almost every aspect of modern life, such as data storage, telecommunications, medical diagnostics, green energy, autonomo…