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physics.app-ph2026
A centimeter-sized gas pressure sensor for high-vacuum measurements at cryogenic temperatures
Christoph Reinhardt, Lea Lara Stankewitz, Daniel Hartwig +5
Gas pressure sensors based on nanomechanical membranes have recently demonstrated an ultra-wide ten-decade measurement range, a gas-type-independent response, and a self-calibratin…
physics.app-ph2023★ 10 cited
Self-calibrating gas pressure sensor with a 10-decade measurement range
Christoph Reinhardt, Hossein Masalehdan, Sandy Croatto +6
Recent years have seen a rapid reduction in the intrinsic loss of nanomechanical resonators (i.e., chip-scale mechanical oscillators). As a result, these devices become increasingl…