10 citations · 13 across the 4 of their papers we have counts for
4 papers
A bulk acoustic resonator with vertical electrodes for wideband filters
Silvan Stettler, Edgar Navarro-Gesse, Carlos Collado +2
Radiofrequency (RF) front ends for current and next generation (5G and 6G) wireless communication demand acoustic filters that combine wide bandwidth, high power capability, and th…
Suspended lithium niobate acoustic resonators with buried electrodes for radiofrequency filtering
Silvan Stettler, Luis Guillermo Villanueva
Data rates and volume for mobile communication are ever-increasing with the growing number of users and connected devices. With the deployment of 5G and 6G on the horizon, wireless…
Rayleigh Wave Suppression in Al0.6Sc0.4N-on-SiC Resonators
Marco Liffredo, Silvan Stettler, Federico Peretti +1
We report on the fabrication of a Hybrid SAW/BAW resonator made of a thin layer of Sc-doped AlN (AlScN) with a Sc concentration of 40 at% on a 4H-SiC substrate. A Sezawa mode, exci…
More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators
Marco Liffredo, Federico Peretti, Nan Xu +2
Deep Ultraviolet (DUV) Photolithography is currently used to fabricate mass-scale integrated circuits (ICs). Its high throughput and resolution could benefit large-scale RF MEMS pr…