most citedMicromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale

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cond-mat.soft2009★ 71 cited

Micromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale

Cédric Ayela, Liviu Nicu

Although extensively presented as one of the most promising silicon-based micromachined sensor adapted to real-time measurements in liquid media, the cantilevered structure still s…