most citedDose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2

30 citations · 30 across the 1 of their papers we have counts for

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1 paper

cond-mat.mtrl-sci2009★ 30 cited

Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2

Vinzenz Friedli, Ivo Utke, Kristian Molhave +1

Bending and vibration tests performed inside the scanning electron microscope were used to mechanically characterize high-aspect pillars grown by focused electron-beam (FEB) induce…