Crystallinity Evolution of MOCVD-Grown $\beta$-Ga${}_2$O${}_3$ Films Probed by In Situ HT-XRD under Different Reactor Heights

Imteaz Rahaman, Botong Li, Bobby G. Duersch +3

The crystallinity of $\beta$-Ga${}_2$O${}_3$ thin films grown by metal-organic chemical vapor deposition (MOCVD) is strongly influenced by reactor design and the resulting growth environme…