5 papers · 1 filter
In-Plane Q Anisotropy of Higher-Order XBARs
Byeongjin Kim, Ian Anderson, Ruochen Lu
128Y-cut lithium niobate (LN) laterally field-excited higher-order antisymmetric bulk acoustic resonators (XBARs) have attracted interest for high-frequency acoustic device…
Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compensation Using Periodically Poled Piezoelectric Bilayers
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +1
In this work, we experimentally investigate the gradient stress (sigma1) in 128 deg Y-cut transferred thin film lithium niobate (TFLN) films with thicknesses from 100 to 460 nm usi…
Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +4
In this work, we present the first experimental study of residual stress and post-release beam deflection in 128-degree Y-cut thin-film lithium niobate (TFLN) on Si, revealing pron…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer
Ziqian Yao, Vakhtang Chuluhadze, Zihuan Liu +5
This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium…