3 papers
physics.app-ph2026
Ultra-shallow EUV and soft X-ray gratings fabricated by broad-beam nitrogen ion irradiation
Johannes Kaufmann, Thomas Siefke, Uwe Zeitner
Controlled and precise fabrication of structures with heights in the range of single digit nanometres is one of the challenges for diffraction gratings operating near-normal incide…
physics.plasm-ph2025
Long Living Hot and Dense Plasma from Relativistic Laser-Nanowire Array Interaction
Ehsan Eftekhari-Zadeh, Mikhail Gyrdymov, Parysatis Tavana +13
Long-living, hot and dense plasmas generated by ultra-intense laser beams are of critical importance for laser-driven nuclear physics, bright hard X-ray sources, and laboratory ast…
physics.optics2024
Fabrication of low-loss lithium niobate on insulator waveguides on the wafer scale
Mohammadreza Younesi, Thomas Kasebier, Ilia Elmanov +8
We report on the wafer scale fabrication of single mode low-loss lithium niobate on insulator waveguides utilizing a chemically amplified resist and an optimized dry etching method…