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cond-mat.mtrl-sci2025
Enhanced Secondary Electron Detection of Single Ion Implants in Silicon Through Thin SiO2 Layers
Ella B Schneider, Oscar G Lloyd-Willard, Kristian Stockbridge +7
Deterministic placement of single dopants is essential for scalable quantum devices based on group-V donors in silicon. We demonstrate a non-destructive, high-efficiency method for…
cond-mat.mtrl-sci2023
Detection Sensitivity Limit of Hundreds of Atoms with X-Ray Fluorescence Microscopy
Mateus G. Masteghin, Toussaint Gervais, Steven K. Clowes +10
We report X-ray fluorescence (XRF) imaging of nanoscale inclusions of impurities for quantum technology. A very bright diffraction-limited focus of the X-ray beam produces very hig…