Design and simulation of a 4H-SiC low gain avalanche diode with trench-isolation

Sebastian Onder, Philipp Gaggl, Jürgen Burin +6

We present the design and simulation of a 30 $\mu \mathrm{m}$ thick 4H-SiC Low Gain Avalanche Diode (LGAD) optimized for high-voltage operation. A 2.4 $\mu \mathrm{m}$ thick epitaxially…