2 papers
cond-mat.mtrl-sci2026
High-Performance Scaled P-Type SnOx Transistor by Atomic Layer Deposition with CFET Integration
Ziheng Wang, Wen He, Chen Gu +8
The development of high-performance p-type oxide semiconductors is essential for realizing complementary logic for monolithic 3D integration, yet p-type oxide semiconductors still…
cond-mat.mtrl-sci2025
Dielectric Deposition Enhanced Crystallization in Atomic-Layer-Deposited Indium Oxide Transistors Achieving High Gated-Hall Mobility Exceeding 100 cm2/Vs at Room Temperature
Chen Wang, Kai Jiang, Jinxiu Zhao +4
In this work, we report high-performance atomic-layer-deposited indium oxide (In2O3) transistors with high gated-Hall mobility (μH) exceeding 100 cm2/Vs at room temperature (RT). I…