Observation of Transparency of Erbium-doped Silicon nitride in photonic crystal nanobeam cavities

Yiyang Gong, Maria Makarova, Selcuk Yerci +6

One-dimensional nanobeam photonic crystal cavities are fabricated in an Er-doped amorphous silicon nitride layer. Photoluminescence from the cavities around 1.54 um is studied at c…