Niobium nitride-based normal metal-insulator-superconductor tunnel junction microthermometer

S. Chaudhuri, M. R. Nevala, I. J. Maasilta

We have successfully fabricated micron-scale Cu-AlO${}_x$-Al-NbN normal metal-insulator-superconductor (NIS) tunnel junction devices, using pulsed laser deposition (PLD) for NbN f…