66 citations · 105 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2007★ 66 cited
Diffusion and activation of n-type dopants in germanium
Masahiro Koike, Yoshiki Kamata, Tsunehiro Ino +4
The diffusion and activation of -type impurities (P and As) implanted into -type Ge(100) substrates were examined under various dose and annealing conditions. The secondary i…
cond-mat.mtrl-sci2006★ 39 cited
Dielectric Properties of Noncrystalline HfSiON
Masahiro Koike, Tsunehiro Ino, Yuuichi Kamimuta +5
The dielectric properties of noncrystalline hafnium silicon oxynitride (HfSiON) films with a variety of atomic compositions were investigated. The films were deposited by reactive…