Epitaxial Growth of Ultra-smooth $\hat{I}´$-NbN Thin Films on TiN-Buffered Sapphire by Room-Temperature Sputtering

Swagata Bhunia, Aakash Shandilya, Sounak Samanta +7

The $\hat{I}´$ phase of Niobium Nitride (NbN) is a promising superconducting material, which is chemically stable and shares lattice compatibility with conventional III-Nitride semicondu…