2 papers
physics.optics2024
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Michael Tanksalvala, Christina L. Porter, Yuka Esashi +22
Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by…
physics.optics2024
Sub-wavelength coherent imaging of periodic samples using a 13.5 nm tabletop high harmonic light source
Dennis F. Gardner, Michael Tanksalvala, Elisabeth R. Shanblatt +9
Coherent diffractive imaging is unique as the only route for achieving diffraction-limited spatial resolution in the extreme ultraviolet and X-ray regions, limited only by the wave…