20 citations · 37 across the 4 of their papers we have counts for
4 papers
Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns
S. Burger, L. Zschiedrich, F. Schmidt +3
We present rigorous 3D EMF simulations of isolated features on photomasks using a newly developed finite-element method. We report on the current status of the finite-element solve…
3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method
S. Burger, L. Zschiedrich, F. Schmidt +4
Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and optics design of nanostructured components. As has been…
Rigorous Simulation of 3D Masks
S. Burger, R. Köhle, L. Zschiedrich +4
We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size…
Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation
S. Burger, R. Köhle, L. Zschiedrich +4
An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was pr…