most cited3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method

4 citations · 4 across the 2 of their papers we have counts for

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physics.optics2007

Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns

S. Burger, L. Zschiedrich, F. Schmidt +3

We present rigorous 3D EMF simulations of isolated features on photomasks using a newly developed finite-element method. We report on the current status of the finite-element solve…

physics.optics2007★ 4 cited

3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method

S. Burger, L. Zschiedrich, F. Schmidt +4

Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and optics design of nanostructured components. As has been…