most citedCMOS-Compatible, Wafer-Scale Processed Superconducting Qubits Exceeding Energy Relaxation Times of 200us

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CMOS-Compatible, Wafer-Scale Processed Superconducting Qubits Exceeding Energy Relaxation Times of 200us

T. Mayer, J. Weber, E. Music +12

We present the results of an industry-grade fabrication of superconducting qubits on 200 mm wafers utilizing CMOS-established processing methods. By automated waferprober resistanc…

quant-ph2025

Wafer-Scale Characterization of Al/AlxOy/Al Josephson Junctions at Room Temperature

Simon J. K. Lang, Ignaz Eisele, Johannes Weber +13

Josephson junctions (JJs) are the key element of many devices operating at cryogenic temperatures. Development of time-efficient wafer-scale JJ characterization for process optimiz…