3 papers
physics.plasm-ph2026
Autonomous Sampling and SHAP Interpretation of Deposition-Rates in Bipolar HiPIMS
Alexander Wieczorek, Nathan Rodkey, Jan Sommerhäuser +2
High-power impulse magnetron sputtering (HiPIMS) offers considerable control over ion energy and flux, making it invaluable for tailoring the microstructure and properties of advan…
physics.ins-det2025
Accurate Reporting of Ion Time-of-Flight during HiPIMS with Gated Front-End Mass Spectrometry
Nathan Rodkey, Jyotish Patidar, Kerstin Thorwarth +1
The quality of high-power impulse magnetron sputtering (HiPIMS) deposited films can often improve through the effective use of metal-ion acceleration, requiring precise measurement…
physics.app-ph2025
Ferroelectric AlScN thin films with enhanced polarization and low leakage enabled by high-power impulse magnetron sputtering
Federica Messi, Jyotish Patidar, Nathan Rodkey +3
The demand for efficient data processing motivates a shift toward in-memory computing architectures. Ferroelectric materials, particularly AlScN, show great promise for next-genera…