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Enhanced Permittivity in Wurtzite ScAlN through Nanoscale Sc Clustering
James L Hart, Andrew C Lang, Matthew T Hardy +8
ScN alloyed AlN (ScxAl1-xN, ScAlN) is a wurtzite semiconductor with attractive ferroelectric, dielectric, piezoelectric, and optical properties. Here, we show that ScAlN films (wit…
Toward Enhanced Inertial Sensing via Dynamically Soft Topological States in Piezoelectric Microacoustic Metamaterials
Onurcan Kaya, Niccolo Scalise Pantuso, Marco Galli +10
In recent decades, microelectromechanical systems (MEMS)-based gyroscopes have been employed to meet positioning and navigation demands of a plethora of commercially available devi…
Plasmonically Enhanced Flexural-Mode AlScN Nanoplate Resonator as Uncooled and Ultrafast IR Detector with High Responsivity
Aurelio Venditti, Walter Gubinelli, Enise F. Altin +4
This letter introduces a novel class of miniaturized, uncooled, and ultra-fast infrared (IR) resonant thermal detectors (RTDs) based on 30%-doped Aluminum Scandium Nitride (AlScN)…
Power Handling Improvement in Cross-Sectional Lame Mode Resonators Operating in the Ku-band
Luca Spagnuolo, Gabriel Giribaldi, Filippo Perli +3
This study presents power handling improvements in cross-sectional Lame-Mode Resonators (CLMRs) designed for operation in the Ku-band. Previously fabricated CLMR devices failed at…
Laterally Excited Bulk Acoustic Wave (LBAW) X-Cut Lithium Niobate Resonators
Walter Gubinelli, Ryan Tetro, Pietro Simeoni +2
In this work, Laterally excited Bulk Acoustic Wave (LBAW) resonators on X-cut Lithium Niobate (LiNbO3) and, for the first time their higher-order overtones (LOBAW) are demonstrated…
High-performance solidly mounted bidimensional mode resonators (S2MRs) operating around 16 GHz
Luca Spagnuolo, Luca Colombo, Kapil Saha +3
This paper reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) utilizing 30% Scandium-doped Aluminum Nitride on Silicon Carbide, operating near 16 GHz. Experimental re…
Lithium niobate acoustic resonators operating beyond 900 C
Walter Gubinelli, Hasan Karaca, Ryan Tetro +4
In this paper, fundamental shear-horizontal SH0 mode Leaky Surface Acoustic Wave (LSAW) resonators on X-cut lithium niobate leveraging dense and robust electrodes such as gold and…
Strongly dispersive dielectric properties of high-ScN-fraction ScAlN deposited by molecular beam epitaxy
Vikrant J. Gokhale, James G. Champlain, Matthew T. Hardy +9
We present a comprehensive study of dielectric properties including complex permittivity, loss, and leakage of high-ScN-fraction ScAlN thin films grown using molecular beam epitaxy…