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Power Handling Improvement in Cross-Sectional Lame Mode Resonators Operating in the Ku-band
Luca Spagnuolo, Gabriel Giribaldi, Filippo Perli +3
This study presents power handling improvements in cross-sectional Lame-Mode Resonators (CLMRs) designed for operation in the Ku-band. Previously fabricated CLMR devices failed at…
Laterally Excited Bulk Acoustic Wave (LBAW) X-Cut Lithium Niobate Resonators
Walter Gubinelli, Ryan Tetro, Pietro Simeoni +2
In this work, Laterally excited Bulk Acoustic Wave (LBAW) resonators on X-cut Lithium Niobate (LiNbO3) and, for the first time their higher-order overtones (LOBAW) are demonstrated…
ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators
Luca Colombo, Luca Spagnuolo, Kapil Saha +3
This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Car…
Characterization of Acoustic Losses in Interdigitated VHF to mmWave Piezoelectric M/NEMS Resonators
Luca Colombo, Gabriel Giribaldi, Ryan Tetro +6
This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the charac…
2-16 GHz Multifrequency X-Cut Lithium Niobate NEMS Resonators on a Single Chip
Ryan Tetro, Luca Colombo, Matteo Rinaldi
This work presents the design, fabrication, and testing of X-Cut Lithium Niobate (LN) acoustic nanoelectromechanical (NEMS) Laterally Vibrating Resonators (LVRs) and Degenerate LVR…
Scandium Aluminum Nitride Overmoded Bulk Acoustic Resonators for Future Wireless Communication
Walter Gubinelli, Pietro Simeoni, Ryan Tetro +2
This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) f…