4 papers
Enhanced Permittivity in Wurtzite ScAlN through Nanoscale Sc Clustering
James L Hart, Andrew C Lang, Matthew T Hardy +8
ScN alloyed AlN (ScxAl1-xN, ScAlN) is a wurtzite semiconductor with attractive ferroelectric, dielectric, piezoelectric, and optical properties. Here, we show that ScAlN films (wit…
Power Handling Improvement in Cross-Sectional Lame Mode Resonators Operating in the Ku-band
Luca Spagnuolo, Gabriel Giribaldi, Filippo Perli +3
This study presents power handling improvements in cross-sectional Lame-Mode Resonators (CLMRs) designed for operation in the Ku-band. Previously fabricated CLMR devices failed at…
High-performance solidly mounted bidimensional mode resonators (S2MRs) operating around 16 GHz
Luca Spagnuolo, Luca Colombo, Kapil Saha +3
This paper reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) utilizing 30% Scandium-doped Aluminum Nitride on Silicon Carbide, operating near 16 GHz. Experimental re…
Strongly dispersive dielectric properties of high-ScN-fraction ScAlN deposited by molecular beam epitaxy
Vikrant J. Gokhale, James G. Champlain, Matthew T. Hardy +9
We present a comprehensive study of dielectric properties including complex permittivity, loss, and leakage of high-ScN-fraction ScAlN thin films grown using molecular beam epitaxy…