1 citations · 1 across the 3 of their papers we have counts for
3 papers
Enhanced Permittivity in Wurtzite ScAlN through Nanoscale Sc Clustering
James L Hart, Andrew C Lang, Matthew T Hardy +8
ScN alloyed AlN (ScxAl1-xN, ScAlN) is a wurtzite semiconductor with attractive ferroelectric, dielectric, piezoelectric, and optical properties. Here, we show that ScAlN films (wit…
Modeling Practical Capacitive Structures for Electronic and Dielectric Property Extraction and Analysis
James G. Champlain, Vikrant J. Gokhale, Matthew T. Hardy +1
A method for modeling the full steady-state and small-signal behavior of practical capacitive structures, such as metal-insulator-metal capacitors, diodes, and transistors, is pres…
Strongly dispersive dielectric properties of high-ScN-fraction ScAlN deposited by molecular beam epitaxy
Vikrant J. Gokhale, James G. Champlain, Matthew T. Hardy +9
We present a comprehensive study of dielectric properties including complex permittivity, loss, and leakage of high-ScN-fraction ScAlN thin films grown using molecular beam epitaxy…