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20232025
most citedDynamic evolution of internal stress, grain growth, and crystallographic texture in arc-evaporated AlTiN thin films using in-situ synchrotron x-ray diffraction

1 citations · 1 across the 10 of their papers we have counts for

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cond-mat.mtrl-sci2023★ 1 cited

Dynamic evolution of internal stress, grain growth, and crystallographic texture in arc-evaporated AlTiN thin films using in-situ synchrotron x-ray diffraction

Sanjay Nayak, Tun-Wei Hsu, Robert Boyd +5

Understanding the nucleation and growth of polycrystalline thin films is a long-standing goal. Polycrystalline films have many grains with different orientations that affect thin-f…

cond-mat.mtrl-sci2023

Effects of deposition temperature on the mechanical and structural properties of amorphous Al-Si-O thin films prepared by RF magnetron sputtering

Stefan Karlsson, Per Eklund, Lars Österlund +2

Aluminosilicate (Al-Si-O) thin films containing up to 31 at. % Al and 23 at. % Si were prepared by reactive RF magnetron co-sputtering. Mechanical and structural properties were me…