18 citations · 25 across the 4 of their papers we have counts for
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cs.LG2025
Unitho: A Unified Multi-Task Framework for Computational Lithography
Qian Jin, Yumeng Liu, Yuqi Jiang +2
Reliable, generalizable data foundations are critical for enabling large-scale models in computational lithography. However, essential tasks-mask generation, rule violation detecti…
cs.CV2025★ 7 cited
SEM-CLIP: Precise Few-Shot Learning for Nanoscale Defect Detection in Scanning Electron Microscope Image
Qian Jin, Yuqi Jiang, Xudong Lu +5
In the field of integrated circuit manufacturing, the detection and classification of nanoscale wafer defects are critical for subsequent root cause analysis and yield enhancement.…