Characterization of ion track etched conical nanopores in thermal and PECVD SiO${}_2$ using small angle X-ray scattering

Shankar Dutt, Rudradeep Chakraborty, Christian Notthoff +3

Conical nanopores in amorphous SiO${}_2$ thin films fabricated using the ion track etching technique show promising potential for filtration, sensing and nanofluidic applications.…