34 citations · 34 across the 1 of their papers we have counts for
1 paper · 1 filter
Guillaume Jourdan, Gauthier Torricelli, Joël Chevrier +1
Fabrication of Nano-Electro-Mechanical-Systems (NEMS) of high quality is nowadays extremely efficient. These NEMS will be used as sensors and actuators in integrated systems. Their…