195 citations · 527 across the 6 of their papers we have counts for
6 papers
Miniature Plasma Source for In-Situ Scanner Cleaning
Mark van de Kerkhof, Edgar Osorio, Vladimir Krivtsun +3
EUV Lithography is the technology of choice for High-Volume Manufacturing (HVM) of sub-10nm lithography. One of the challenges is to enable in-situ cleaning of functional surfaces…
Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon
R. M. van der Horst, J. Beckers, E. A. Osorio +1
The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impac…
Electric Field Controlled Magnetic Anisotropy in a Single Molecule
Alexander S. Zyazin, Johan W. G. van den Berg, Edgar A. Osorio +8
We have measured quantum transport through an individual Fe single-molecule magnet embedded in a three-terminal device geometry. The characteristic zero-field splittings of adj…
Electrical manipulation of spin states in a single electrostatically gated transition-metal complex
Edgar A. Osorio, Kasper Moth-Poulsen, Herre S. J. van der Zant +5
We demonstrate an electrically controlled high-spin (S=5/2) to low-spin (S=1/2) transition in a three-terminal device incorporating a single Mn2+ ion coordinated by two terpyridine…
Electronic excitations of a single molecule contacted in a three-terminal configuration
Edgar A. Osorio, Kevin O'Neill, Maarten Wegewijs +4
Low-temperature three-terminal transport measurements through a thiol end-capped Pi -conjugated molecule have been carried out. Electronic excitations, including zero and finite-bi…
Self-breaking in planar few-atom Au constrictions for nm-spaced electrodes
K. O'Neill, E. A. Osorio, H. S. J. van der Zant
We present results on electromigrated Au nanojunctions broken near the conductance quantum S. At room temperature we find that wires, initially narrowed by an actively-cont…