254 citations · 1.3k across the 39 of their papers we have counts for
1 paper · 2 filters
Xiaohui Tang, Nicolas Reckinger, Olivier Poncelet +5
We investigate the structural damage of graphene underlying dielectrics (HfO2 and Al2O3) by remote plasma-enhanced atomic layer deposition (PE-ALD). Dielectric film is grown on bil…