Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect

Ruey-Fang Shyu, Hsiharng Yang, Wen-Ren Tsai +1

This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) substr…