2 papers
cs.OH2008
Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System
Salim Touati, Nicolas Lorphelin, Alexandre Kanciurzewski +4
This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described w…
cs.OH2007
Electrostatic Actuators Operating in Liquid Environment : Suppression of Pull-in Instability and Dynamic Response
A. -S. Rollier, M. Faucher, B. Legrand +2
This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theor…