most citedCharacterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology

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cs.OH2007★ 2 cited

Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology

P. Szabo, B. Nemeth, M. Rencz +1

Our paper presents a non-destructive thermal transient measurement method that is able to reveal differences even in the micron size range of MEMS structures. Devices of the same d…