3 citations · 3 across the 2 of their papers we have counts for
2 papers
cs.OH2008
High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection
Jian Lu, T. Ikehara, Yi Zhang +3
A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive…
cs.OH2007★ 3 cited
A Silicon-Based Micro Gas Turbine Engine for Power Generation
X. -C. Shan, Z. -F. Wang, R. Maeda +3
This paper reports on our research in developing a micro power generation system based on gas turbine engine and piezoelectric converter. The micro gas turbine engine consists of a…