2 papers
cond-mat.mtrl-sci2025
X-ray diffraction characterization of suspended structures for MEMS applications
P. Goudeau, N. Tamura, B. Lavelle +6
Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques…
cs.OH2007
Electrostatically-Driven Resonator on Soi with Improved Temperature Stability
A. Giridhar, F. Verjus, F. Marty +2
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant f…