2 papers
cs.OH2007
Model of Electrostatic Actuated Deformable Mirror Using Strongly Coupled Electro-Mechanical Finite Element
V. Rochus, J. -C. Golinval, C. Louis +2
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in…
cs.OH2007
3-D Self-Assembled Soi Mems: An Example of Multiphysics Simulation
C. Mendez, C. Louis, S. Paquay +6
MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Silicon-on-Insulator) MEM…