most citedFlexible graphene transistors for recording cell action potentials

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cs.OH2007

Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching

A. Phommahaxay, G. Lissorgues, L. Rousseau +2

Advances in material processing such as silicon micromachining are opening the way to vacuum microelectronics. Two-dimensional vacuum components can be fabricated using the microsy…