579 citations · 730 across the 2 of their papers we have counts for
Showing cond-mat.mtrl-sciShow all
2 papers · 1 filter
cond-mat.mtrl-sci2009★ 151 cited
Wafer-Scale, Sub-5 nm Junction Formation by Monolayer Doping and Conventional Spike Annealing
Johnny C. Ho, Roie Yerushalmi, Gregory Smith +5
We report the formation of sub-5 nm ultrashallow junctions in 4 inch Si wafers enabled by the molecular monolayer doping of phosphorous and boron atoms and the use of conventional…
cond-mat.mtrl-sci2007★ 579 cited
Wafer-Scale Assembly of Semiconductor Nanowire Arrays by Contact Printing
Zhiyong Fan, Johnny C. Ho, Zachery A. Jacobson +4
Controlled and uniform assembly of "bottom-up" nanowire (NW) materials with high scalability has been one of the significant bottleneck challenges facing the potential integration…