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physics.ins-det2025
Fabrication and Characterization of X-ray TES Detectors Based on Annular AlMn Alloy Films
Yifei Zhang, Zhengwei Li, Mengxian Zhang +16
AlMn alloy flms are widely fabricated into superconducting transition edge sensors (TESs) for the detection of cosmic microwave background radiation. However, the application in X-…
physics.ins-det2024
Cryogenic microwave performance of silicon nitride and amorphous silicon deposited using low-temperature ICPCVD
Jiamin Sun, Shibo Shu, Ye Chai +10
Fabrication of dielectrics at low temperature is required for temperature-sensitive detectors. For superconducting detectors, such as transition edge sensors and kinetic inductance…