Micro-transfer printing of GaSb optoelectronics chips for mid-infrared silicon photonics integrated circuits

Heidi Tuorila, Jukka Viheriälä, Yeasir Arafat +4

3D integration of GaSb-based gain chips on a silicon photonics platform using micro-transfer printing is demonstrated for the first time. The release process of GaSb coupons, and t…