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physics.optics2025
3D surface profiling via photonic integrated geometric sensor
Ziyao Zhang, Yizhi Wang, Chunhui Yao +11
Measurements of microscale surface patterns are essential for process and quality control in industries across semiconductors, micro-machining, and biomedicines. However, the devel…
physics.optics2025
Tri-layer SiN-on-Si 8x8 Optical Switches with Thermo-optic and Electro-optic Actuators
Bohao Sun, Chunhui Yao, Tongyun Li +11
We present two spatial-multiplexed switch-and-select (S&S) 8x8 optical switches incorporating a tri-layer SiN-on-Si platform, one equipped with thermo-optic (T-O) and the other ele…