2 papers
physics.optics2026
Alignment-Free Nanometric Optical Metrology Enabled by Structured Light
Yu Wang, Benquan Wang, Eng Aik Chan +7
Advances in the semiconductor industry are driven by the development of increasingly compact devices featuring intricate etched geometries, the characterization of which essentiall…
physics.optics2025
Production-ready double-side fabrication of dual-band infrared meta-optics using deep-UV lithography
Kai Sun, Xingzhao Yan, Jordan Scott +3
Meta-optics, the application of metasurfaces into optical systems, is seeing an accelerating development owing to advantages in size, weight and cost and the ability to program opt…