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physics.optics2008
Fabrication and Characterization of Large Area Metallic Nano-Split-Ring Arrays by Nanoimprint Lithography
Can Peng, Shufeng Bai, Stephen Y. Chou
This paper presents a novel method to parallel fabricate large area (wafer scale) metallic nano-split-ring arrays with nanoimprint lithography (NIL). To our knowledge it is the fir…
physics.optics2005
Overlay Alignment Using Two Photonic Crystals
Can Peng, Keith Morton, Zhaoning Yu +1
In this paper we proposed a novel overlay alignment method using two sets of identical photonic crystals (PhCs). In this method the reflection or transmission spectrum of the two o…