most citedMicro Embossing of Ceramic Green Substrates for Micro Devices

5 citations · 12 across the 6 of their papers we have counts for

collaborators

6 papers

cs.OH2008

High Aspect Pattern Formation by Integration of Micro Inkjetting and Electroless Plating

P. W. Gian, Xuechuan Shan, Y. N. Liang +3

This paper reports on formation of high aspect micro patterns on low temperature co-fired ceramic (LTCC) substrates by integrating micro inkjetting with electroless plating. Micro…

cs.OH2008

Study of mechanical response in embossing of ceramic green substrate by micro-indentation

Y. C. Liu, X. -C. Shan

Micro-indentation test with a micro flat-end cone indenter was employed to simulate micro embossing process and investigate the thermo-mechanical response of ceramic green substrat…

cs.OH2008★ 2 cited

Large Area Roller Embossing of Multilayered Ceramic Green Composites

X. Shan, Y. C. Soh, C. W. P. Shi +2

In this paper, we will report our achievements in developing large area patterning of multilayered ceramic green composites using roller embossing. The aim of our research is to pa…

cs.OH2008★ 5 cited

Micro Embossing of Ceramic Green Substrates for Micro Devices

X. -C. Shan, S. H. Ling, H. P. Maw +2

Multilayered ceramic substrates with embedded micro patterns are becoming increasingly important, for example, in harsh environment electronics and microfluidic devices. Fabricatio…

cs.OH2008★ 2 cited

Studies of Polymer Deformation and Recovery in Hot Embossing

X. C. Shan, Y. C. Liu, H. J. Lu +2

In large area micro hot embossing, the process temperature plays a critical role to both the local fidelity of microstructure formation and global uniformity. The significance of l…

cs.OH2007★ 3 cited

A Silicon-Based Micro Gas Turbine Engine for Power Generation

X. -C. Shan, Z. -F. Wang, R. Maeda +3

This paper reports on our research in developing a micro power generation system based on gas turbine engine and piezoelectric converter. The micro gas turbine engine consists of a…