most citedTowards a Methodology for Analysis of Interconnect Structures for 3D-Integration of Micro Systems

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cs.OH2008★ 1 cited

Towards a Methodology for Analysis of Interconnect Structures for 3D-Integration of Micro Systems

P. Schneider, S. Reitz, A. Wilde +2

Functional aspects as well as the influence of integration technology on the system behavior have to be considered in the 3D integration design process of micro systems. Therefore,…