107 citations · 287 across the 19 of their papers we have counts for
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cs.OH2007
New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films
D. Fabrègue, Nicolas André, T. Pardoen +1
A new concept of micromachines has been developed for measuring the mechanical properties of thin metallic films. The actuator is a beam undergoing large internal stresses built up…
cs.OH2007
3-D Self-Assembled Soi Mems: An Example of Multiphysics Simulation
C. Mendez, C. Louis, S. Paquay +6
MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Silicon-on-Insulator) MEM…