3 papers
cs.OH2008
Out-of-Plane Cmos Compatible Magnetometers
M. El Ghorba, N. André, S. Sobieski +1
Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert ma…
cs.OH2007
New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films
D. Fabrègue, Nicolas André, T. Pardoen +1
A new concept of micromachines has been developed for measuring the mechanical properties of thin metallic films. The actuator is a beam undergoing large internal stresses built up…
cs.OH2007
3-D Self-Assembled Soi Mems: An Example of Multiphysics Simulation
C. Mendez, C. Louis, S. Paquay +6
MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Silicon-on-Insulator) MEM…