2 papers
cs.OH2008
A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection
Y. -H. Wang, Tzu-Han Hsueh, Rong-Hua Ma +4
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses…
cs.OH2008
Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor
Yu-Hsiang Wang, C. -C. Hsiao, Chia-Yen Lee +2
This study has successfully demonstrated a novel self-heating formaldehyde gas sensor based on a thin film of NiO sensing layer. A new fabrication process has been developed in whi…